Peña-Pedraza, H., S. A. López-Rivera, F. Sequeda, Ch. Power, J. M. Martin, and A. R. Muñoz. “haracterization of hin ilms of lSiN rown on apphire ubstrate”. Acta Microscopica 20, no. 1 (May 27, 2011): 66-70. ccessed November 21, 2024. https://acta-microscopica.org/acta/article/view/421.