Peña-Pedraza H, López-Rivera SA, Sequeda F, Power C, Martin JM, Muñoz AR. Characterization of Thin Films of AlSiN Grown on Sapphire Substrate. acta [nternet]. 27May2011 [cited 8May2024];20(1):66-0. vailable from: https://acta-microscopica.org/acta/article/view/421