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Techo Research Laboratory, Hitachi Instruments Engineering Co. Ltd.
Design Deparmcnt, Hitachi Science Systems Co., Ltd
How to Cite
Development of Natural SEM and Some Applications
Vol 2 No 1 (1993)
Published: Mar 31, 1993
Recently, the study of insulators and water containing specimens has increased with the widespread use of SEMs. The authors developed Natural SEM operating at a low vacuum (l-270Pa). A stable low vacuum condition that is not influenced by external factors such as outgassing from the specimen and a simple changeover function to and from high vacuum mode was realized by a real-time low vacuum control function and independent low vacuum evacuation system.