Abstract

CVD diamond films have been produced on the surface of 304 stainless steel (304 SS) with a titanium interlayer by using a microwave plasma source. ln this work, the previous surface modification of the 304 SS with adherent titanium films and subsequent deposition of CVD diamond films are presented and discussed. The titanium intermedíate layer was obtained by vapor phase deposition produced by an electron beam device. The CVD diamond films were obtained by microwave plasma source, using several C H, and H? gas mixtures. It was employed the two-step method for diamond deposition. These films were characterized by scanning electrón microscope (SEM) and energy dispersive spectrometry (EDS). The results showed the nucleation of CVD diamond films with low adherence.