The surface modification of silicon sheets with titanium and titanium+nitrogen is presented by means of a hybrid high voltage pulsed discharge and electric arc in a vacuum. The spectral diagnostic shows an approximate value of the temperature of the titanium cathode in the hybrid discharges of  and in the arc discharges of . The morphology of the surfaces was obtained and analyzed using scanning electron microscopy and energy dispersive X-ray techniques. It is evidenced that surfaces modified with titanium+nitrogen present greater homogeneity compared to surfaces modified with titanium due to the lower distribution of microdroplets formed, validating the influence of hybrid discharges as a possible coating manufacturing method in various applications on science, engineering, and technology of materials.